|
The Latin prefix "infra" means "below" or "beneath." Thus "infrared"
refers to the region beyond or beneath the red end of the visible color
spectrum. The infrared region is located between the visible and
microwave regions of the electromagnetic spectrum. Because heated
objects radiate energy in the infrared, it is often referred to as the
heat region of the spectrum. All objects radiate some energy in the
infrared, even objects at room temperature and frozen objects such as
ice.
The higher the temperature of an object, the higher the
spectral radiant energy, or emittance, at all wavelengths and the
shorter the predominant or peak wavelength of the emissions. Peak
emissions from objects at room temperature occur at 10 µm. The sun has
an equivalent temperature of 5900 K and a peak wavelength of 0.53 µm
(green light). It emits copious amounts of energy from the ultraviolet
to beyond the far IR region.
Much of the IR emission spectrum is unusable for detection
systems because the radiation is absorbed by water or carbon dioxide in
the atmosphere. There are several wavelength bands, however, with good
transmission.
- The long wavelength IR (LWIR) band spans roughly 8-14 µm, with
nearly 100% transmission on the 9-12 µm band. The LWIR band offers
excellent visibility of most terrestrial objects.
- The medium wavelength IR (MWIR or MIR) band (3.3-5.0 µm)
also offers nearly 100% transmission, with the added benefit of lower,
ambient, background noise.
- Visible and short wavelength IR (SWIR or near IR, NIR)
light (0.35-2.5 µm) corresponds to a band of high atmospheric
transmission and peak solar illumination, yielding detectors with the
best clarity and resolution of the three bands. Without moonlight or
artificial illumination, however, SWIR imagers provide poor or no
imagery of objects at 300K.
An infrared detector is simply a transducer of radiant energy,
converting radiant energy in the infrared into a measurable form.
Infrared detectors can be used for a variety of applications in the
military, scientific, industrial, medical, security and automotive
arenas. Since infrared radiation does not rely on visible light, it
offers the possibility of seeing in the dark or through obscured
conditions, by detecting the infrared energy emitted by objects. The
detected energy is translated into imagery showing the energy
differences between objects, thus allowing an otherwise obscured scene
to be seen. For example, the left image below is what you may see in
ordinary light on a dark night. The image at right is the same scene
but as seen with an Infrared camera. Hot objects such as people stand
out from the typically cooler backgrounds regardless of the available
visible light.
Under infrared light, the world reveals features not apparent
under regular visible light. People and animals are easily seen in
total darkness, weaknesses are revealed in structures, components close
to failure glow brighter, visibility is improved in adverse condition
such as smoke or fog.
There are two fundamental methods of IR detection, energy and photon
detection. Energy detectors respond to temperature changes generated
from incident IR radiation through changes in material properties.
Photon detectors generate free electrical carriers through the
interaction of photons and bound electrons. Energy detectors are low
cost and typically used in single detector applications; common
applications include fire detection systems and automatic light
switches. However, the simplicity of fabricating large 2D focal plane
arrays in semiconductors has lead to the use of photon detectors in
almost all advanced IR detection systems. Recent advances in
micromachining and materials science have lead to the exciting field of
uncooled detectors which promise lower system and operation costs.
The absorption of IR energy heats the detection element in energy or
thermal detectors, leading to changes in physical properties which can
be detected by external instrumentation and which can be correlated to
the scene under observation. Energy detectors contain two elements, an
absorber and a thermal transducer. The following are examples of energy
detectors.
Thermocouples / Thermopiles
Thermocouples are formed by joining two dissimilar metals which
create a voltage at their junction. This voltage is proportional to the
temperature of the junction. When a scene is optically focused onto a
thermocouple, its temperature increases or decreases as the incident IR
flux increases or decreases. The change in IR flux emitted by the scene
can be detected by monitoring the voltage generated by the
thermocouple. For sensitive detection, the thermocouple must be
thermally insulated from its surroundings. For fast response, the
thermocouple must be able to quickly release built up heat. This
tradeoff between sensitivity of detection and the ability to respond to
quickly changing scenes is inherent to all energy detectors.
A thermopile is a series of thermocouples connected together to provide increased responsivity.
2 Pyroelectric Detectors
Pyroelectric detectors consist of a polarized material which, when
subjected to changes in temperature, changes polarization. These
detectors operate in a chopped system; the fluctuation in the exposure
to the scene generates a corresponding fluctuation in polarization and
thus an alternating current that can be monitored with an external
amplifier.
Ferroelectric Detectors
Similar to pyroelectric detectors, ferroelectric detectors are based
on a polarized material which, when subjected to changes in
temperature, changes polarization.
Thermistors / Bolometers / Microbolometers
In thermistors, the resistance of the elements varies with
temperature. One example of a thermistor is a bolometer. Bolometers
function in one of two ways: monitoring voltage with constant current
or monitoring current with constant voltage.
Advances in the micromachining of silicon have lead to the
exciting field of microbolometers. A microbolometer consists of an
array of bolometers fabricated directly onto a silicon readout circuit.
This technology has demonstrated excellent imagery in the IR. Although
the performance of microbolometers currently falls short of that of
photon detectors, development is underway to close the performance gap.
Microbolometers can operate near room temperature and therefore do not
need vacuum evacuated, cryogenically cooled dewars. This advantage
brings with it the possibility of producing low cost night vision
systems for both military and commercial markets.
Microcantilevers
Microcantilevers are based on the bimetal effect to measure IR
radiation. This effect utilizes the difference in thermal expansion
coefficients of two different bimetals to cause a displacement of a
microcantilever. In combination with a reference plate, this cantilever
forms a capacitance. When infrared light is absorbed by the
microcantilever, the microcantilever deflects and thus alters the
capacitance of the structure. This change in capacitance is a measure
for the incident infrared radiation.
Light interacts directly with the semiconductors in photon detectors
to generate electrical carriers. Because these detectors do not
function by changing temperature, they respond faster than energy
detectors. However, these detectors will also pick up the IR radiation
generated by their own mountings and accompanying optics and thus must
be cooled to cryogenic temperatures to minimize background noise. The
following are examples of photon detectors.
Intrinsic Detectors
Photovoltaic Intrinsic Detectors
Photovoltaic (PV) detectors generate photocurrents which can be
monitored with a trans-impedance amplifier. These photocurrents are
created when incident light with energy greater than or equal to the
energy gap, or diode junction, of the semiconductor strikes the
detector causing excited, minority, electrical carriers to be swept
across the photodiode's electrical junction.
PV devices operate in the diode's reverse bias region; this
minimizes the current flow through the device which in turn minimizes
power dissipation. In addition, PV detectors are low noise because the
reverse bias diode junction is depleted of minority carriers. The
highest performance PV detectors are fabricated from Si, Ge, GaAs,
InSb, InGaAs, and from HgCdTe (MCT).
Photoconductive Intrinsic Detectors
Photoconductive (PC) detectors function similarly to PV detectors.
Incident light with energy greater than or equal to the energy gap of
the semiconductor generates majority electrical carriers. This results
in a change in the resistance, and hence conductivity, of the detector.
Examples of PC detector materials are Lead sulfide (PbS), Lead selenide
(PbSe) and MCT.
Extrinsic Detectors
Extrinsic detectors are based on Si (SiX) or Ge (GeX) doped with
impurities such as Boron, Arsenic and Gallium. They are similar to
intrinsic detectors. However, in extrinsic detectors carriers are
excited from the impurity levels and not over the bandgap of the basic
material. Both photovoltaic and photoconductive types exist.
Photo-emissive Detectors
Photo-emissive detectors are based on the emission of carriers from
a metal into a semiconductor material through the absorption of light.
A typical example is Platinum Silicide (PtSi) on Si.
Quantum Well Infrared Photodetector
The Quantum Well Infrared Photodetector (QWIP) is an infrared
detector that consists of multiple alternating thin gallium arsenide
(GaAs) and aluminum gallium arsenide (AlGaAs) layers. Carriers are
generated by absorption of IR light inside quantum wells.
The table below summarizes the main detector types and materials.

Many of these IR materials are based on compound semiconductors
made of III-V elements such as indium, gallium, arsenic, antimony, or
on the II-VI elements mercury, cadmium and telluride, or on the IV-VI
elements lead, sulfur and selenide. They can be combined into binary
compounds such as GaAs, InSb, PbS and PbSe or into ternaries such as
InGaAs or HgCdTe.
Infrared detectors are available as single element detectors in
circular, rectangular, cruciform, and other geometries for reticle
systems, as linear arrays, and as 2D focal plane arrays (FPAs).
Single element detectors are normally frontside
illuminated and wire bonded devices. Linear and 2D arrays may be
fabricated with a variety of device and signal output architectures.
First generation linear arrays were usually
frontside illuminated, with the detector signal output connected by
wire bonding to each element in the array. The signal from each element
was then brought out of the vacuum package and connected to an
individual room temperature preamplifier prior to interfacing with the
imaging system display. Gain adjustments were usually made in the
preamplifier circuitry. This approach limited first generation linear
arrays to less than two hundred elements.
Second generation arrays, both linear and 2D,
are frequently backside illuminated through a transparent substrate.
Several alternative focal plane architectures are illustrated in the
graph below.
The diagram below illustrates a detector array which is
electrically connected directly to an array of preamplifiers and/or
switches called a readout. The electrical connection is made with
indium "bumps" which provide a soft metal interconnect for each pixel.
This arrangement, commonly referred to as a "direct hybrid",
facilitates the interconnection of large numbers of pixels to
individual preamplifiers coupled with row and column multiplexers.
Indirect hybrid configurations (b) may be used
with large linear arrays to interface the detector with a substrate
having a similar thermal coefficient of expansion. These hybrids may
also be used for serial hybridization, allowing the detector to be
tested prior to committing the readout, and/or to accommodate readout
unit cells having dimensions larger than the detector unit cell,
increasing the charge storage capacity and thereby extending the
dynamic range. Readouts and detectors are electrically interconnected
by a patterned metal bus on a fanout substrate.
Monolithic detector arrays (c) have integrated
detector and readout functions. Generally, in these arrays, the command
and control signal processing electronics are adjacent to the detector
array, rather than underneath. In this case, the signal processing
circuits may be connected to the detector by wire bonds. In the
monolithic configuration it is not necessary for the signal processing
circuits to be on the same substrate as the detector/readout (as shown
in the figure) or at the same temperature as the detector. Monolithic
PtSi detector arrays can be made with signal processing incorporated on
the periphery of the detector/readout chip through the use of
silicon-based detector technology.
Z technology, as illustrated in figure (d),
provides extended signal processing real estate for each pixel in the
readout chip by extending the structure in the orthogonal direction. In
the approach illustrated, stacked, thinned readout chips are glued
together, and the detector array is connected to the edge of this
signal processing stack with indium.
Finally, a "Loophole" approach, as illustrated
in figure (e), relies on thinning the detector material after
adhesively bonding it to the silicon readout. Detector elements are
connected to the underlying readout with vias, which are etched through
the detector material to contact pads on the readout and metallized.
Infrared detectors are in general used to detect, image, and measure
patterns of the thermal heat radiation which all objects emit. Early
devices consisted of single detector elements that relied on a change
in the temperature of the detector. Early thermal detectors were
thermocouples and bolometers which are still used today. Thermal
detectors are generally sensitive to all infrared wavelengths and
operate at room temperature. Under these conditions, they have
relatively low sensitivity and slow response.
Photon detectors were developed to improve sensitivity and
response time. These detectors have been extensively developed since
the 1940's. Lead sulfide (PbS) was the first practical IR detector. It
is sensitive to infrared wavelengths up to ~3 µm.
Beginning in the late 1940's and continuing into the 1950's, a
wide variety of new materials were developed for IR sensing. Lead
selenide (PbSe), lead telluride (PbTe), and indium antimonide (InSb)
extended the spectral range beyond that of PbS, providing sensitivity
in the 3-5 µm medium wavelength (MWIR) atmospheric window.
The end of the 1950's saw the first introduction of
semiconductor alloys, in the chemical table group III-V, IV-VI, and
II-VI material systems. These alloys allowed the bandgap of the
semiconductor, and hence its spectral response, to be custom tailored
for specific applications. MCT (HgCdTe), a group II-VI material, has
today become the most widely used of the tunable bandgap materials.
As photolithography became available in the early 1960's it
was applied to make IR sensor arrays. Linear array technology was first
demonstrated in PbS, PbSe, and InSb detectors. Photovoltaic (PV)
detector development began with the availability of single crystal InSb
material.
In the late 1960's and early 1970's, "first generation" linear
arrays of intrinsic MCT photoconductive detectors were developed. These
allowed LWIR forward looking imaging radiometer (FLIR) systems to
operate at 80K with a single stage cryoengine, making them much more
compact, lighter, and significantly lower in power consumption.
The 1970's witnessed a mushrooming of IR applications combined
with the start of high volume production of first generation sensor
systems using linear arrays.
At the same time, other significant detector technology
developments were taking place. Silicon technology spawned novel
platinum silicide (PtSi) detector devices which have become standard
commercial products for a variety of MWIR high resolution applications.
The invention of charge coupled devices (CCDs) in the late
1960's made it possible to envision "second generation" detector arrays
coupled with on-focal-plane electronic analog signal readouts which
could multiplex the signal from a very large array of detectors. Early
assessment of this concept showed that photovoltaic detectors such as
InSb, PtSi, and MCT detectors or high impedance photoconductors such as
PbSe, PbS, and extrinsic silicon detectors were promising candidates
because they had impedances suitable for interfacing with the FET input
of readout multiplexers. PC MCT was not suitable due to its low
impedance. Therefore, in the late 1970's through the 1980's, MCT
technology efforts focused almost exclusively on PV device development
because of the need for low power and high impedance for interfacing to
readout input circuits in large arrays. This effort has been paying off
in the 1990's with the birth of second generation IR detectors which
provide large 2D arrays in both linear formats. These detectors use TDI
for scanning systems; in staring systems, they come in square and
rectangular formats.
Monolithic extrinsic silicon detectors were demonstrated first
in the mid 1970's. The monolithic extrinsic silicon approach was
subsequently set aside because the process of integrated circuit
fabrication degraded the detector quality. Monolithic PtSi detectors,
however, in which the detector can be formed after the readout is
processed, are now widely available.
Second generation devices have now been demonstrated with many
detector materials and device types, including PbS, PbSe, InSb,
extrinsic Si, PtSi, and PV MCT.
It has taken nearly two decades since the invention of the CCD
to mature the integration of IR detectors coupled with electronic
readouts on the focal plane. This progress brought with it the
transition from first generation to second generation device
production. The size and complexity of infrared image detectors
corresponds to the evolution of silicon integrated circuit size and
complexity; this can be seen through comparison to dynamic random
access memory chip trends (see graph below). Note that DRAMs require
just one transistor per unit cell, whereas infrared sensor readouts
require three or more, one of which must be a low noise analog device.

|